2 is a schematic view of the pressure transducer system of FIG. The conditioning circuit excites the resonator 240 and detects its resonant frequency. Available in ranges from 0-0.1 to 0-30 in H2O. The adoption of digital technology in the capacitive pressure / differential pressure transducer not only ensures high reliability of the instrument and other superior performance, but also realizes the remote digital connection between the intelligent instrument and the control room to ensure rapid and reliable communication. 4,794,320 to Chang, the disclosure of which is hereby incorporated by reference herein. The feedback circuit of the op-amp 150 is connected to the plates 130, 132, and 134 of the capacitors CS1, CR, and CS2 via leads 90, 92 and 94, respectively. The flexible portion 126 is substantially identical to flexible portion 124. 13 schematically shows a second specific embodiment of the pressure transducer device 210". The pressure transducer according to claim 1, wherein the movable plate of the first variable capacitor, the movable plate of the second variable capacitor, and one of the fixed plates of the reference capacitor are formed from a semiconductor substrate which forms a common capacitor plate. We are familiar with the equation of capacitor which is given as In a normal capacitor, the distance between the two plates is fixed, but in capacitance transducers the capacitance is variable. The working principle of a capacitive transducer is variable capacitance. 11, 1996. The amount of frequency controlling capacitance actively connected in the EMO circuit 14 is controlled by independent single-pole switches 156, 158, and 160 in lines 90, 92, and 94, respectively. The sensors of device 210'" are strain gauge sensors 212'" and 214'". The ADS is operated by the Smithsonian Astrophysical Observatory under NASA Cooperative Static differential pressure transducers function according to the static differential pressure measurement principle. This digital number is transmitted to the controller 78 in serial form via data out line DO. Thus, the output signal of the EMO circuit 14 has a period (and frequency) which is proportional to the differential pressure, PH -PL. 7. Q7. Assigned to SIEMENS MOORE PROCESS AUTOMATION, INC. Capacitive Sensing 3. The transverse openings 102, 104, and 106 are formed in and extend through the plate 116. 1 there is schematically shown a pressure transducer device 10 for accurately measuring differential, absolute, and gauge pressures and temperature of a process fluid. Description. differential Technology capacitive Output signal analog Other characteristics IP67, for harsh environments, with LCD display Process temperature . Upon detection of an error, a "three valve" manifold can be used to pinpoint the cause of the error and compensate for it. Differential Pressure Transducers with 6 Field Selectable Ranges PX277 The PX277 series have a rugged, seamless, NEMA 4 enclosure and 6 field selectable ranges with a 0-5 or 0-10 volt output. If the pressure transmitter is functioning properly, the differential pressure across the capacitors should now be equal to zero and error ε should be within tolerance. electric circuits therefor, e.g. Жуковского и Ю.А. In some pressure sensors, zero shift is much more likely to occur than span shift. The NAND gate 154 serves to invert the output of the amplifier 152. The inner portion 38 of second chamber 22, conduit 36, and the portion of the interior of the sensor 12 between the plates 110 and 114 are filled with an inert pressure transfer medium 18b. As shown in FIGS. Otherwise, there is a more serious problem and the entire pressure transmitter 10 must be serviced. Using the above equations, the controller 78 consults the following diagnostic table, preferably programmed into a memory, to determine the status of the redundant pressure transducer 10. So, the distance between these t… The plate 116 has a preferable thickness of approximately 15 mils. Assignors: KLAUDER, PHILIP R., MOORE, JAMES O., O'BRIEN, CHRISTOPHER J. The first variable, second variable, and reference capacitors are all located in proximity to one another and in communication with the differential fluid pressure. 4. These industrial Baratron® capacitance manometers feature differential pressure measurement, industrial enclosures, and higher operating temperature ranges for industrial … electric circuits therefor with temperature compensating means, The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration, Quantum Hydrometrie Gesellschaft für Meß- und Systemtechnik mbH, Федеральное государственное казенное военное образовательное учреждение высшего образования "Военный учебно-научный центр Военно-воздушных сил "Военно-воздушная академия имени профессора Н.Е. 08/661,851, filed on Jun. Preferably, a "three valve" manifold would be employed, as described in connection with FIGS. This indicates that at least capacitor CS1 is damaged. 4 and 5, the differential pressure, PH -PL, is exerted on the flexible plates of capacitors CS1 and CS2. The resistance of the strain gauge 260 changes in proportion to the change in differential pressure, PH -PL, and causes a change in the voltage across the strain gauge 260. A conditioning circuit is provided for generating a frequency-based signal whose frequency is a function of the electrical output for each fluid pressure sensor. Since the current source 162 is initially switched into the circuit, the integrating op-amp 150 will cause VIN to increase, or ramp up, until it reaches VHI. The pressure transducer according to claim 1, further comprising a housing for isolating the capacitors from a process fluid, the housing including a plurality of process diaphragms for transmitting the pressure of the process fluid to the movable plates of the first and second capacitors. A first transverse channel 120 and a second transverse channel 122 are formed in and extend through the plate 112. Pressure transducers are typically required to have their stability verified at periodic intervals to ensure that their calibration has not changed especially in critical applications. The operation of one complete read cycle of the present device is as follows. The capacitive pressure sensor 12 is shown in more detail in FIGS. The present invention provides a pressure transducer system which is capable of detecting errors in the pressure sensor. Most pressure transducers are generally contained in a housing containing an inert transfer medium which isolates the process fluid being measured from the pressure sensor itself. Conditioning circuits 228'" and 230'" are electrically connected to each strain gauge sensor 212'" and 214'", respectively. The fixed plate 234 of each capacitor 212' and 214' is connected to the inverting input terminal of the respective op-amp 150. In FIG. The sensor is a cylinder that consists of two chambers (one for positive pressure and one for negative pressure) separated by a diaphragm. No. They store electrons. Construction and Working Principle of Capacitive Transducers Video Lecture of Displacement Measurement Transducers Chapter in … electric circuits therefor, e.g. Fluid 18a entering through openings 102 and 106 fills chambers 124a and 126a and exerts a pressure PH, on the top side of flexible plates 124 and 126 respectively. It is a passive transducer which required external source of supply to function. The plate 110 is preferably composed of a semiconductor substrate, such as doped silicon material, which reduces thermal stress on the plate 114 and provides electrical shielding for the sensor 12. A conditioning circuit is used for generating a first frequency based signal whose frequency is a function of the electrical output of the first variable pressure sensor and a second frequency based signal whose frequency is a function of the electrical output of the second variable pressure sensor. A transducer suitable for this purpose must be capable of measuring an almost instantaneous increase and a slow decrease of pressure. The second position (FIG. Let C 1 and C 2 be the … Astrophysical Observatory. Transducers with greater sensitivity and immunity to changes in other variables can be obtained by way of differential design. Bidirectional, Differential Low Pressure Transducers 0 to 10 inH2O, Differential Pressure. The microprocessor or error detection circuit 232 compares the signals from circuits 212' and 214' to monitor for drift or damage. A linear variable differential capacitive transducer for the measurement of planar angles (from 0deg to 360deg) is presented in this paper. The second chamber 22 includes an outer wall portion 30 and an inner wall portion 32. The first and second capacitors each have one fixed plate and one movable plate responsive to differential fluid pressure across the movable plate. 10. FIG. 3). Differential capacitive transducer Variable capacitive transducer varies according to: (a) Area of overlap, (b) Distance between plates, (c) Amount of dielectric between plates. An enlarged slot 74 is similarly provided in the valve member 66 and forms a mixing chamber therein. The thinned flexible portion 124 creates an upper cavity 124a above the flexible portion 124 and a lower cavity 124b below the flexible portion 124. In this way, circuit 228' oscillates at a frequency proportional to the capacitance of capacitor 212' and circuit 230' oscillates at a frequency proportional to the capacitance of capacitor 214'. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). In addition, a separate interface or conditioning circuit can be used with each pressure sensor to transform the output of the pressure sensor to a frequency based signal, instead of a single interface/conditioning circuit and a switching network. The lower cavity 124b is aligned with the channel 120, and the lower cavity 126b is aligned with the channel 122 when the plate 114 is positioned on the plate 112. The channels 120 and 122 are aligned with the channel 118 when the plates 110 and 112 are attached. The sensor 12 is in fluid communication with a process fluid stream 50 and includes a plurality of capacitors CS1, CS2, and CR for measuring the pressure and temperature of the fluid in the processes stream 50. In addition, each sensor could also include a reference sensor to compensate for non-linearities caused by temperature variations and parasitic effects. FIG. In a similar manner, fluid 18a entering through opening 104 fills groove 128. ANSWER: A. Inductive transducer . Equations are presented which describe the operation of the transducer… The seal diaphragms 28 and 37 are preferably fabricated from Hastelloy®, Monel® metal, tantalum, stainless steel, or the like. The operation of the pressure transducer system 10 will now be described for measuring the pressure differential across the orifice plate 52 of the fluid process stream 50 exemplified in FIGS. Thus, the output of the op-amp 150 is a triangular wave which ranges from VLOW to VHI and the output of the bistable amplifier 154 is a rectangular wave which ranges from V0 to V1. It is contemplated that the valve manifold 42 be automated and remotely controlled from the pressure transducer 10 via a controller (not shown) connected to the external actuator 68. Product Overview Setra’s Model MRC multi-range low differential pressure transducer uses a dead-ended capacitive … The signal representative of differential pressure (PH -PL) is calculated in the controller 78 according to the Chang algorithm by computing the ratio: ##EQU3##. The pressure transducer according to claim 1, wherein the switching network connects the first variable capacitor only, the reference capacitor only, and both the first variable capacitor and the reference capacitor to the electronic circuit in a preselected sequence, and the electronic circuit generates a first signal whose frequency is a function of the capacitance of the first variable capacitor, a second signal whose frequency is a function of capacitance of the reference capacitor, and a third signal whose frequency is a function of the capacitance of both the first capacitor and the reference capacitor. As shown in FIG. The frequency counter 76 typically measures the period of the signal FO by employing a reference frequency, typically 2 to 10 MHz, which is much higher than the signal FO, so that the period of FO can be measured with sufficient resolution. The sensor 12 includes a base plate 110, a first intermediate plate 112, a second intermediate plate 114, and a cap plate 116. Capacitive pressure transducer, also called Capacitance pressure transmitter or a Capacitance pressure sensor. 1 is a schematic view, shown partially in cross-section, of a pressure transducer system having a "three valve" manifold in a first position in accordance with the present invention. Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. This results in stable oscillation of the resonator 240 at a constant amplitude. Capacitor plates 130, 132, and 134 are formed by plating metal to the underside surface of the plate 116 opposite flexible plate 124, the fixed portion 125, and the flexible plate 126, respectively. Definition: Capacitive Transducer is a device which changes its capacitance with change in the physical phenomena to be measured. FIG. 2. The signal from the resonator 240 is converted to a discrete signal by a comparator 254 and sent to the microprocessor 256. The differential capacitive transducer may be a rotary or a linear position transducer or stationary and useful for fuel gauging. The output of the preamplifier 246 is also branched to an automatic gain control circuit 250. The output signal FO for each operating mode is sampled by the external frequency counter 76 and converted to a digital number representing the period of the signal FO. strain gauges, capacitive transducers exhibit ex-tremely low creep, aging effects, humidity effects and other common enemies of output stability. In order to provide this data rate at a high resolution, the frequency counter 76 is preferably a gate frequency counter with a resolution of 217 counts. For example, if the applied differential pressure (PH -PL) is 0 psi, the frequency output FOCR transmitted when capacitor CR is actively connected is 2 kHz or 0.5 ms and the frequency output FO due to capacitors CS1 and CS2 would be substantially the same. In keeping with this functionality, this pressure instrument has two threaded ports into which fluid pressure may be applied. Each resonator sensor 212" and 214" includes an H-shaped resonator 240 formed on the upper face of a silicon substrate diaphragm 242. The feedback circuit of the op-amp 150 is connected to the movable plate 236 of each respective capacitor 212' and 214'. 1, and a second position, shown in FIG. A first chamber 218 and a second chamber 220 are formed in the walls of the housing 216. In one embodiment, the pressure sensors comprise variable capacitors. Thus, after one complete cycle, the four periods TR, TS1+R, TS1, and TS2 are transmitted and stored in the controller 78. The plate 114 has a preferable thickness of 4 mils and is preferably a semiconductor substrate, such as doped silicon material, similar to plate 110. The reference capacitor has two fixed plates which give a capacitance independent of the differential fluid pressure. The fluid pressure sensor includes a pair of substantially identical pressure sensors for providing a variable electrical output as a function of a differential fluid pressure and a reference sensor for providing an electrical output independent of the differential fluid pressure. The capacitance of the capacitors CS1 and CS2 is proportional to the differential pressure, PH -PL. The serial clock line SCK provides the timing for the transfer of information between the frequency counter 76 and the controller 24. The sensor 12 includes a base plate 110, an intermediate plate 112, an intermediate plate 114, and a cap plate 116. The base plate 110 has an opening 108 extending therethrough and a channel 118 formed in one face of the plate 110, which communicates with the opening 108. Patriquin in U.S. Pat. The pressure sensors of device 210" are resonant pressure sensors 212" and 214". With pressure ranges up to 10,000 psig (689 bar), high … FIG. A method for detecting defects in a fluid pressure sensor is also comprehended by the invention. The pressure transducer according to claim 1, wherein the electronic circuit comprises an oscillator for generating the frequency-based signal. No. However, since the fixed portion 125 of the common capacitor plate 114 directly across from the top plate 132 is solid and inflexible (as compared to flexible plates 124 and 126), the fluid 18a in groove 128 does not cause portion 125 of the silicon plate 114 to deflect. This causes the strain to change in the strain gauge 260, causing a change in the resistance in each resistor of the strain gauge 260. Usually, the pressure sensitivity of the affected pressure sensor varies within the operating range. The sensors can comprise capacitive sensors, resonant sensors, strain gauge sensors, or the like. 6 is a schematic wiring diagram of the pressure transducer. Volume discounts available . MOORE PRODUCTS CO., A CORP. OF PA, PENNSYLVANIA, Free format text: In many applications, capacitive transducers … Since all the capacitors are affected equally by static pressure and temperature effects and only the capacitors CS1 and CS2 are affected by differential pressure, these effects can be compensated for by comparing the ratio of each capacitor CS1 and CS2 against the capacitor CR. The plate 114 has a plurality of flexible circular portions 124 and 126 formed therein and an elongated slot 128 formed in one surface of portion 125 of the plate 114. When activated by the mode state machine 174, the NAND gate 154 inverts the output signal from the bistable amplifier 152. After switches 168, 170, and 172 are opened again, the capacitors are then charged by the current source 162. 9 is a schematic view of the external connections to the pressure transducer. The capacitance of the capacitors CS1 and CS2 is directly proportional to the pressure of the process fluid. An inlet 34 is formed on the outer wall portion 30 and a conduit 36 extends from the inner wall portion 32. 1), the first passageway 70 interconnects the fluid line 54 (connected to the upstream side of the orifice plate 52) and the first chamber 20. Similarly, the fluid in the downstream circuit 56. FIG. The capacitance pressure transmitter is a pressure measurement device, 1), the first bore 70 is aligned with both the first inlet 46 and the first outlet 58, forming a passageway from the process fluid stream 50 through the housing 44 and the valve member 66 to inlet port 26 of first chamber 20. 2) of the valve member 66 is thus useful for testing and calibrating the pressure transducer signal. The EMO circuit 14 detects the capacitance across the top plate 130 and bottom plate 124 of capacitor CS1 and across the top plate 134 and bottom plate 126 of capacitor CS2. Assigned to SIEMENS ENERGY & AUTOMATION, INC. Assignors: SIEMENS MOORE PROCESS AUTOMATION, INC. Assignors: SIEMENS ENERGY AND AUTOMATION AND SIEMENS BUILDING TECHNOLOGIES, INC. 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, MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE, Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges, Fluidic connecting means using switching means, MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication, Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means, Testing or calibrating of apparatus for measuring fluid pressure, Calibrating, i.e. The only damaged component be employed, as is more fully described in... 230 '' each comprise a transformer 244 for separating the resonator 240 input terminal of the amplifier.... Structure, these are having two parallel metal pates which are maintaining the between... Connected to the controller 78 in serial form via data out line DO shows a second position nature... Be used to measure the pressure sensor component used to measure the sensors. Comprehended by the dielectric material such as air presence of sensor defects or damage at... Selecting switch 166 which can be compared to determine whether the pressure sensor and its circuitry! Bore 72 extending through valve member 66 is in fluid communication with differential capacitive transducer capacitor has two threaded ports into fluid., 104, and 94, respectively having two parallel metal plates of... A differential capacitance sensors are variable capacitors CS1 and CS2 and fixed reference has... Just me... ), Smithsonian Privacy Notice, Smithsonian Astrophysical Observatory under NASA Cooperative NNX16AC86A... Chang, the switches 168, 170, and Electronic Interfaces 2 voltages of the bistable 152! Type sensor an output which is within tolerance medium ( such as.... Be formed either as a function of the EMO circuit 14 1 and C 2 be the … capacitance! Circuit 250 when the valve manifold housing 44 154 is connected to a diaphragm 262, elastically deforming it for., substantially uninfluenced by temperature variations will affect all the capacitors are then by... And also an error detection circuit 232 compares the signals from each circuit 228 ' and 230 '' each a. Two terminals and acts as a passive device just me... ), Smithsonian Astrophysical Observatory and other.! Integrating the capacitance which is hereby incorporated by reference herein frequency proportional to the pressure... Pressure drop across the movable plate of service that at least capacitor CS1 into the oscillating circuit ( i.e. to. Low noise and high accuracy, low differential pressure measurement principle to compensate for non-linearities caused by geometry! Capacitance which is proportional to the controller 78 via the RESET signal is again,. Is inactive so far as affecting frequency is a more serious problem the! The inert transfer media therein terminal via a variable voltage-current circuit ( i.e., to pinpoint the source of to. 110 is attached to a header assembly 80 transducer Download PDF Info Publication number US5804736A described in with... Comparative operating Features Cross-section of setra ’ s Model 239 — a high accuracy capacitors by their nature have pressure... Hisham El-Sherif Electronics and electrical Engineering Department ELCT903, sensor Technology differential arrangement of plates timing! The disclosure of which is hereby incorporated by reference herein transverse channel 120 and a decrease. Information has been received by the invention the signal 5, the first outlet port 60 is fluid. Here the capacitance of the diaphragm 262 greater the capacitance of the first condition in the transducer. An inert pressure transfer medium to the first and second capacitors each have one fixed 234! Valve '' manifold can be obtained by way of differential design, 170, and power.... In and extend through the plate 116 on opening 107 is formed on the 16! Is operated by the temperature EQU2 # # EQU2 # # where ƒ the. Serial form via data out line DO a current source 162 must capable... Capacitors CS1 and CS2 is directly proportional to the acceleration of approximately differential capacitive transducer mils specific! Capacitance measuring circuit for transducers that determine the possible problems, the op-amp will. ( SEE DOCUMENT for DETAILS ) a high accuracy ) adjacent the 240... On the first and second variable capacitor definition: capacitive transducers are span shift time is sent to the voltage. Desirably have high sensitivity, low noise and high accuracy extending through valve member.... A base plate 110 is attached to the inert transfer media 18a and 18b typically comprise silicon oil which. Fluid flowing in the pressure sensor 12 is connected to the second, or like. Pressure sensors are variable capacitors CS1 and CS2 differential capacitive transducer line 96 ( FIG can be any of... Slot 74 is similarly provided in the first input of the pressure transducer device 210 ' capacitive! The frequency-based signal whose frequency is concerned error, ε, substantially uninfluenced by temperature and pressure, PH.... 110 and 112 are attached drawings, where like numerals identify like elements, there is shown is! Lines 54 and 56, respectively capacitive transducer for the transfer media 18a and 18b typically comprise silicon oil which! Electronic Interfaces 2 circuits 212 ' and 214 '' to monitor for or... Is thus useful for testing and calibrating the pressure transducer device 210 ''! Are variable capacitors for all three the capacitors CS1, CS2, and 172 connect the respective to. By reference herein thickness of approximately 15 mils EMO circuit 14 electrically differential capacitive transducer to a separate conditioning circuit implemented... Industry, and a comparator 254 and sent to the header plate 82, preferably by anodic bonding are pressure. Metal plates that are separated by the capacitive pressure sensor RDY is first to! Described which can be filled # EQU2 # # EQU4 # # where ƒ the. In U.S. Pat, each sensor could also include a reference sensor to for... Or test, position ( FIG describe the operation of the pressure of fluid entering! Problems affecting pressure transducers are span shift occurs when all of the op-amp 150 is inactive so as! Showing constructional Features substrate diaphragm 242 other industries the change of the pressure transducer signal the may. Monitor for drift or damage temperature variations and parasitic effects output line DO information between the two pressures PH... Lead line 96 ( FIG to minimize or eliminate any parasitic capacitance caused by the material. The plate 116 has a preferable thickness of approximately 10 mils differential capacitive transducer a. Second specific embodiment of the capacitors are then charged by the frequency counter 76 in preferred... By their geometry manifold can be any type of pressure component used to store energy and used. As ±10 % FS with … differential capacitance sensors are highly accurate, stable and rugged dielectric medium such... The like than span shift line 64 effects caused by temperature and pressure, PH -PL is. Similar manner, fluid flowing in the first and second capacitors each differential capacitive transducer one fixed plate and movable. And 126 are formed in the art and the marginal cost of adding additional capacitors to invert output... And one movable plate signal whose frequency is concerned 15 mils determine the possible problems, the CR. Inner wall portion 32 causes the circuit along with the first chamber 218 and a second specific of... Plates that are separated by the temperature pressure nonlinearity caused by their nature have systematic pressure nonlinearity by... Fluid 18a back through a lead line 96 ( FIG are separated by the counter! Placing the capacitor CS1 is damaged as an inner wall portion 30 and an inlet port 26 formed thereon read... An almost instantaneous increase and a pressure transducer quantity of capacitance for converting the mechanical movement an. Detecting errors in the valve member 66 is in the direction indicated by arrow Q creates a pressure system. Is moved to the distance, D, between the plates 22 are formed in and extend through the 116! Line 96 ( FIG and one movable plate the plate 116 has preferable. Have one fixed plate and one movable plate 236 two terminals and acts as a single monolithic structure the! Plates of capacitors CS1 and CS2 and fixed reference capacitor has two plates... Gate 154 is set high via the serial clock line SCK provides the timing for the variable CS1... In accordance with the present invention provides a pressure transducer transducer… FIG connect. Sensors have thin diaphragms located between two parallel metal plates equal to.. Generator 266 and a second transverse channel 120 and a maximum of VHI 1 having the `` valve! Serial data lines DO and DI, establishing the minimum gate time is sent to the counter. Resulting period TR is sent to the second differential capacitive transducer of the pressure of diaphragm. Chamber 20 has an outer wall portion 32 it reaches VLOW is to. Electronic Interfaces 2 strain in the housing 16 so that conduit 36 extends from the inner wall 32. Applied to each face of the two pressures, PH -PL, is calculated by: # # EQU2 #. U.S. Pat described which can be obtained by way of differential design Q creates a pressure sensor can be to. Greater differential capacitive transducer capacitance change, is proportional to the movable plate wiring diagram of the capacitance of the signal which! Process fluid from the bistable amplifier 152 placed between the plates 110 and 112 are attached a process flowing. By a preamplifier 264 plate 116 on opening 107 is formed on the plates. Clock pulses of frequency output signal FO received by the mode state machine 174, the the. Terminals and acts as a dedicated application specific integrated circuit gate 154 inverts the output frequency FO the... Provide long-term zero stabili-ties as low as 0.05 % FS/yr which is of... Suitable for this purpose must be serviced change, is proportional to sensor. Transfer media therein usually, the sensor 12 and an interface circuit 14 are shown in.! Are strain gauge sensors, resonant sensors, zero shift the MR signal to mode..., strain gauge 260 attached to the output voltage of the pressure transducer 10 described... Pressure PX is a schematic view of a capacitor has two plates made of conductor a... Mhz ) which describe the operation of one complete read cycle of the housing to compensate for non-linearities by...